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국내 논문지

홈 홈 > 연구문헌 > 국내 논문지 > 전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

Current Result Document : 13 / 20 이전건 이전건   다음건 다음건

한글제목(Korean Title) 초정밀 자기부상 물류 이송장치의 제어 및 공극 센서 오프셋 추정 연구
영문제목(English Title) A Study on the Control and Estimation of Gap Sensor Offset in High-Precision Magnetic Levitation Transport System
저자(Author) 김민   김창현   하창완   원문철   Min Kim   Chang-Hyun Kim   Chang-Wan Ha   Mooncheol Won  
원문수록처(Citation) VOL 67 NO. 01 PP. 0087 ~ 0095 (2018. 01)
한글내용
(Korean Abstract)
영문내용
(English Abstract)
The high-precision magnetic levitation transport system is a transport device applying the principle of magnetic levitation. So it is preferable for manufactory process of semiconductor and display industries. In this system, the gap sensors are arranged discontinuously and turned on or off when the tray moves in the running direction. Therefore, precise gap data is important for precise control of the carrier. However, a slight error occurs in the process of installing the gap sensor. So, in this paper, we introduce the high-precision magnetic levitation transport system for OLED evaporation process. Also, we propose a strategy for stable flight control and an offset algorithm for tracking installation errors transport system. The performances of the proposed algorithm are validated through simulation.
키워드(Keyword) OLED   Gap sensor  
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